We developed the rotary three-layering magnetron sputtering technology and used it to produce Double M-ALN cermets coatings tube which has the advantages of highest thermal efficiency(0.96),lowest emittance rate(<=0.05/20'degree) and working effectively in the high temperature(350-400) in contrast to the normal selective coating evacuated tube.The corresponding film structure is ALN / M-ALN(LMVF) / M-ALN (HMVF) /Cu.
LMVF and HMVF: 1) LMVF: low metal volume fraction 2) HMVF: high metal volume fraction
Features: 1) Length: 1500mm, 1800mm 2) Borosilicate 3.3 glass 3) Absorbing layer: Al-N/Al,absorptance: >93% 4) Higher heat efficiency: 12% higher heat absorbent ratio than normal vacuum tube 5) Resisting ageing and attenuation
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